一、材料生长设备

MBE-001	MBE-002	MBE-003	MBE-004
MOCVD-001	MOCVD-002	ALD-001	PLD-001

二、测试分析设备

STM-001	STM-002	STM-003	STM-004
SPM-001	SPM-002	TEM	FIB
PEEM	SNOM	XPS	NAP-XPS
ARPES	PL	SEM	Raman
IV/CV/Hall	TOF-SIMS	RHEED	LEED

三、器件加工设备

PECVD-001	metal-MBE	ICP-etch	Plasma
Annealing	Sputter	Pattern	Cleaver