About Us

The Vacuum Interconnected Nano-X Research Facility is the largest multifunctional research platform in the world for nano-science and nanotechnology , which integrates the state-of-art capabilities of material growth, device fabrication and characterization/tests together under one ultra-high vacuum environment . It integrates various functional instruments in material productions, device fabrications and characterizations. By connecting different instruments to ultra-high vacuum pipelines, NANO-X is aimed to solve residual particles, surface/interface oxides and absorptions and other contaminations problems, which are intractable in conventional cleanrooms.