MBE-STM

 

   

 

Model : Self-design MBE-STM

Key parameters :

MBE

K-cell: 10

Manipulator: four dimensional, temperature from 40K to 1300℃

Temperature : room temperature to 1000℃

Ion gun: Ar ion gun

STM

Pressure: E-11torr

Temperature: room temperature.

Scan area in XY direction: ±2 um

Scan area in Z direction: 500 nm

Coarse movement in XY direction: ±1 mm

Coarse movement in Z direction: 5 mm