Cat-MBE

Model: SPECS MBE

Key parameters:

Pressure: 2E-10 mbar

Substrate Temperature: 110-1100 K

Epitaxial accuracy: atomic layer

Features:

Equipped with 4 types of evaporator:

Evaporator	Temperature	Type of crucible
Electron Beam Evaporator	3000 K	Rod (Ø3 mm)
High-Temperature Effusion Cell	2300 K	2 cc Ta crucible
Single-Filament Effusion Cell	1700 K	10 cc PBN crucible
Low-Temperature Effusion Cell	1300 K	10 cc PBN crucible

Equipped with a temperature programmed desorption (TPD) system