Model : UHV-RTA-D18 by SKY
Key parameters：
Base pressure:≤3E-10 Torr
Working pressure：≤5E-8 Torr (1000℃)
Furnace material: Tantalum
Maximum heating rate: 50 ℃/s
Working distance: 180-230 mm
Maximum heating temperature: 1100℃
Gas: N2、H2、Ar
