SEM

 

   

Model :Nova NanoSEM450

Key parameters :

Pressure : 4E-4pa

Electron beam resolution: <1.0 nm @15kV

< 1.4 nm @1 kV(secondary electron)

Landing voltage: 50V~30kV

Electron beam intensity: 0.6 pA-200 nA

Energy Dispersive Spectrum: element analysis range Be4-U92, energy spectrum resolution (Mn- ka): better than 129eV

Cathodoluminescence: spectral range 185-900 nm and the function of angular resolution