Nano-X is the world's first large-scale scientific device in nano-field, which integrates material growth, device processing, test and analysis according to the national standards of major scientific and technological infrastructure. It consists of a material preparation platform, device technology platform and test and analysis platform with several comprehensive functions. The experimental station connects the functional equipment through the ultra-high vacuum pipeline, which solves the problems of dust, surface oxidation and adsorption which are difficult to solve in the traditional ultra-clean mode.
Material Growth Equipment